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Series ZZS Box-type Vacuum Coating Machine
  • Uses and features
  • Specification parameter
    Brief introduction
     
    After near 40 years of development, ZZS box-type vacuum coating machine by Rankuum Machinery has formed into a series with size of the vacuum coating chamber varying from 500mm to 3,600mm, and presently, an ideal series for coating of multi-layer optical and electrical thin-films that is widely used in scientific research or mass production by enterprises, research institutions, colleges and tertiary institutions.
     
    Product features
     
    This product has a box-type structure and rear-mounted vacuum system for convenience of operation and maintenance as well as a flattened surface for convenience of cleaning, thus especially suitable for installation in the wall of a clean room.

    The vacuum system is characterized as high in pumping speed and vacuum degree and short in pumping time and production period.

    A tubular heating element is employed for equal baking, an element with a long service time capable to render a maximum temperature of 350℃ and a homogeneity of 270℃±10℃.

    Workpiece rotation, driven by the upper center and provided with water-cooling for the bearing strip and sealing with magnetic fluid, is smooth and reliable.

    A controller on depth of quartz crystal films is employed to realize automatic control throughout the coating procedure.

    The advanced coating control system with a nice and practical human-machine interface is stable and reliable, allowing manual, semi-automatic and full automatic operation.
     

    Scope of application
     
    This machine is applicable to production of IR-CUT filter plate, color separation filter, high-reflection film, AR film, long-wave pass, short-wave pass and various kinds of electrical film.
     
    Standard configurations for common use
     
    Specified in the following table are configurations and indices of our five standard models commonly used. Over years, our company has developed series of box-type vacuum coating machine sized at  350mm, 450mm,500mm, 550mm, 630mm, 700mm, 800mm, 900mm, 1100mm, 1,250mm, 1,300mm, 1,500mm, 1,800mm, 2,200mm and 2,500mm, 3,600mm. Furthermore, our company can, upon request of vast customers, provide customized manufacturing of vacuum coating machine of various forms, including special customization of vacuum chamber size, vacuum system configuration, work holder system, workpiece baking system, monitoring system on film depth, evaporation system, inflation system, ion source system and electrical control system.
    ZZS系列箱式真空鍍膜機
    Series ZZS Box-type Vacuum Coating Machine
     
    常用標準配置表
    Standard configurations for common use
    型  號
    Model
    ZZS600 ZZS700 ZZS800 ZZS900 ZZS1100 ZZS1300 ZZS1800
    真空室尺寸(直徑×高)
    Size of the vacuum chamber (diameter× height)
    Φ600×750 Φ710×850 Φ800×900 Φ900×1000 Φ1100×1300 Φ1300×1300 Φ1800×2000
    極限真空度
    Ultimate vacuum degree
    ≤3.0×10-4Pa
    恢復真空時間
    Time for vacuum recovery
    4.0×10-3Pa≤15min
    抽氣系統(tǒng)
    Pumping system
    擴散泵 Diffusion pump K-400 TK-500 K-600 K-630 TK-500×2 K-630×2 K-800×2
    羅茨泵 Roots pump       ZJP-150 ZJP-300 ZJP-300 ZJP-1200
    機械泵 Mechanical pump 2X-30 2X-70 2X-70 2X-70 2X-70 2X-70 2X-70,H-150×2
    真空測量系統(tǒng)
    Vacuum measuring system
    配三路數(shù)字復合真空計,兩路低真空,一路高真空
    Three-way digital compound vacuum gauge, two ways of low vacuum and one of high vacuum
    操作方式
    Operation mode
    手動/自動
    Manual/automatic
    工件夾具
    Work piece holder
    Φ600 Φ640 Φ750 Φ840 Φ1040 Φ1240 Φ1720
    工件烘烤系統(tǒng)
    Work piece baking system
    上烘烤,鎧裝管狀加熱器加熱,******溫度350℃,PID自動控溫及顯示
    Up baking; heated by sheathed tubular heating element; maximum temperature 350℃; PID automatic temperature control and display.
    蒸發(fā)源
    Evaporation source
     
    電阻蒸發(fā)源
    Resistance evaporation source
    電阻蒸發(fā)源功率4KW(8V、600A)
    Power of the resistance evaporation source: 4KW (8V, 600A)
    電子束蒸發(fā)源
    Electron beam evaporation source
     
    E型電子束蒸發(fā)源,功率6~10KW
    Power of E-type electron beam evaporation source: 6-10KW
    膜厚監(jiān)控系統(tǒng)
    Monitoring system on depth of films
    光學膜厚監(jiān)控,波長范圍380-800nm,9透反射光路,六位電動比較片帶顯示;石英晶體膜厚監(jiān)控,美國SQC-310、IC/6
    The optical film thickness monitor, a wavelength range of 380-800nm, 9transflective optical path, six electric comparison sheet with display; quartz crystal thickness monitoring, the United States SQC-310, IC / 6
    充氣系統(tǒng) charge systems 自動壓強儀2~510-2Pa
    Automatic pressure instrument
    質量流量計:單路單顯,雙路雙顯
    Mass flow meter: one way one display, dual way dual display
    離子輔助(選配)
    Ion-assisted (optional)
    H6霍爾離子源、H10霍爾離子源、Φ12cm考夫曼離子源、Φ16cm考夫曼離子源
    H6 Hall ion source, H10 Hall ion source, Φ12cm Kaufman ion source, Φ16cm Kaufman ion source
    深冷捕集器(選配)
    Cryogenic trap (optional)
    國產(chǎn)12P、國產(chǎn)15P、進口POLYCOLD550、進口POLYCOLD670
    Domestic 12P, 15P, POLYCOLD 550, POLYCOLD 670
     
    動力需求
    Power demand
    冷卻水
    Cooling water
    壓力溫度
    Pressure and temperature
    壓力:0.25~0.35MPa;溫度≤25℃
    Pressure: 0.25-0.35MPa; temperature ≤25℃
    流量
    Flow rate
    ≥50L/min ≥60L/min ≥80L/min ≥100L/min ≥140L/min ≥160L/min ≥180L/min
    壓縮空氣
    Compressed air
    壓力:0.5~0.7MPa
    Pressure: 0.5-0.7MPa
    ******消耗電力
    Maximum power consumption
    ~25KW ~35KW ~40KW ~45KW ~50KW ~60KW ~120KW
    設備外形尺寸(寬×深×高)
    Overall dimension (width×depth×height)
    2100×1800×2000 3350×2600×2370 3580×3000×2450 3870×3600×2670 3870×3600×2670 3900×4050×2950 4400×4000×3600
    設備總重(KG)
    Gross weight (Kg)
     
    約1500
    About 1,500
    約2000
    About 2,000
    約2500
    About 2,500
    約3000
    About 3,000
    約3000
    About 3,000
    約4000
    About 4,000
    約6000
    About 4,000
     
     
     

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